An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering - Microelectromechanical Systems Series

2nd Edition

Book (30 Jun 2004)

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Publisher's Synopsis

Written in a clear, no-nonsense style, this book brings both students and practitioners to an understanding of how microelectromechanical systems (MEMS) are designed and manufactured.

Book information

ISBN: 9781580535908
Publisher: Artech House
Imprint: Artech House
Pub date:
Edition: 2nd Edition
DEWEY: 621.381
DEWEY edition: 22
Language: English
Number of pages: 283
Weight: 716g
Height: 257mm
Width: 185mm
Spine width: 26mm