Publisher's Synopsis
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions - Materials Science and Process Technology Series
Hardback (31 Dec 1990)
- $183.00
Includes delivery to the United States
10+ copies available online - Usually dispatched within 7 days
Check stock
Book information
| ISBN: | 9780815512202 |
| Publisher: | Elsevier Science |
| Imprint: | William Andrew |
| Pub date: | 31 Dec 1990 |
| DEWEY: | 621.044 |
| DEWEY edition: | 19 |
| Language: | English |
| Number of pages: | 523 |
| Weight: | 860g |
| Height: | 229mm |
| Width: | 152mm |
| Spine width: | 34mm |
