Nanofabrication by Ion-Beam Sputtering

Nanofabrication by Ion-Beam Sputtering Fundamentals and Applications

Hardback (14 Nov 2012)

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Publisher's Synopsis

Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attractive. This book reviews various fascinating results, understand the underlying physics of ion induced pattern formation, to highlight the potential applications of the patterned surfaces, and to explore the patterning behavior by different irradiation parameters in order to create desired surface morphologies on specific materials.

Book information

ISBN: 9789814303750
Publisher: Jenny Stanford Publishing
Imprint: Jenny Stanford Publishing
Pub date:
DEWEY: 620.115
DEWEY edition: 23
Language: English
Number of pages: 372
Weight: 660g
Height: 161mm
Width: 234mm
Spine width: 25mm