Hardback (01 Jan 1989)
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Translated from the Russian edition (Nauka Publishing House, 1987). Results are given from an experimental investigation of the kinetic principles of etching of polymer resists in low-temperature plasma, the processes of nonresistive ion lithography, and modifications of electron resist films by medium energy ions. Significant attention is devoted
| ISBN: | 9780941743303 |
| Publisher: | Nova Science Publishers Inc |
| Imprint: | Nova Science Publishers Inc |
| Pub date: | 01 Jan 1989 |
| Language: | English |
| Weight: | 201g |
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