These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.
| ISBN | 0819434736 | | Volumes | 001 | | ISBN13 | 9780819434739 (What's this?) | | Weight (grammes) | 726 | | Publisher | SPIE Press | | Published in | Bellingham | | Imprint | SPIE Press | | Series title | Proceedings of SPIE | | Format | Hardback | | Height (mm) | 267 | | Publication date | 31 Aug 1999 | | Width (mm) | 210 | | Library of Congress | TJ163.M485 | | Academic level | Postgraduate, Professional / Scholarly | | Pages | 304 | |
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