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ISBN: 9780819434739 - Micromachined Devices and Components V
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Micromachined Devices and Components V

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Patrick J. French, Eric Peeters

ISBN: 9780819434739
Format: Hardback
Publisher:SPIE Press


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These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.

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These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.
 
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